Evatec evaporator heating lamp

Tue, 09 Jun 2026 03:24:12 +0800

On the fab floor, a 0.3°C drift during photoresist bake isn’t a “small deviation.” It’s a yield hit. When soft bake and hard bake temperatures wander, critical dimension control falls apart, and the line stops trusting the data. We built the Evatec evaporator heating lamp to take that uncertainty off the table. What matters, technically It’s short-wave infrared (SWIR) delivered through quartz—fast, direct heating with low thermal inertia. Across the process zone, wafer-level uniformity holds at ±0.1°C, and repeatability stays locked by a stable filament load and a controlled power supply. It’s compatible with Class 1–100 cleanrooms, engineered to generate zero particles, and built to run 24/7 without unplanned downtime. The payoff is a thermal budget you can count on, batch after batch. Here’s why it works in practice. In evaporation and photoresist bake stations, time, temperature, and contamination control are one system. The Evatec lamp hits setpoint quickly, holds steady, and cools without overshoot—shortening cycle time while protecting the resist profile. Tight thermal control means less rework, less scrap, and lithography performance that stays stable across product mixes. You also save energy by avoiding unnecessary overheating and recovery cycles, and the long lamp life keeps maintenance interruptions off the schedule. A few practical notes. Installation comes down to matching the fixture interface and reflector geometry to your chamber—mismatched optics will create hot spots. Before integration, verify power and cooling compatibility with your evaporator platform, and plan lamp replacement around scheduled downtime so thermal calibration stays intact. When everything lines up, you get consistent bake performance—without the variability that tends to hide in conventional heating methods.

Evaporator on Infrared Heating Lamp Sets

Evatec evaporator heating lamp