Flexible display drying lamp fab

Fri, 26 Jun 2026 04:41:44 +0800

On the flexible display line, the drying step isn’t just a pause. It’s the line in the sand between solid patterning and scrap. When the lamp starts underperforming, solvent hangs around. The photoresist skins unevenly, and CD control drifts. You know what follows: rework, missed lots, and wafers running late. We built this drying lamp for exactly that reality. What matters under the hood We run short-wave infrared in a quartz envelope. It delivers fast, directional heat that gets into the resist without scorching the substrate. The heater array is tuned for wafer-level thermal uniformity—±0.1°C across the active zone—so every shot gets the same thermal budget. The housing is cleanroom-compatible down to Class 1–100, and the zero-particle design keeps particle counts flat even during long bakes. Setpoints repeat, shift after shift, day after day. Why it holds up in flexible display fabs You’re running thin substrates, sensitive organic stacks, and thermal windows that don’t forgive much. This lamp dries and bakes with controlled ramp and soak, supporting both soft bake and hard bake profiles that protect critical dimensions and adhesion. The payoff is fewer defects, stable CD uniformity, and yield you can count on. Energy use drops because the lamp heats on demand and holds temperature without overshoot, and uptime stays solid with components rated for 24/7 operation. A few field notes Installation is straightforward, but thermal coupling to the stage is where the details live. Plan to tune the setpoint offset once to match your chuck and substrate stack. The lamp plays nice with standard interfaces, though the compact footprint may mean minor tool reconfiguration. Run a short qualification to lock the profile—once it’s set, the process stays locked.

Display on Infrared Heating Lamp Sets

Flexible display drying lamp fab